microlithography
Noun. Any of several techniques for the production of micro scale devices; especially the production of semiconductor devices using beams of photons or electrons.This is an unmodified, but possibly outdated, definition from Wiktionary and used here under the Creative Commons license. Wiktionary is a great resource. If you like it too, please donate to Wikimedia.
This entry was last updated on RefTopia from its source on 3/20/2012.